“KF Type” Centering Ring Seal Assembly
Within critical semiconductor vacuum environments, KF centering ring seal assemblies must maintain a reliable, effective vacuum seal. In order to assure maximum seal performance, O-rings on these assemblies must provide low compression set and high retained resiliency. Parker’s full range of KF type centering rings are available in standard ISO sizes assembled with Parker O-ring materials commonly used in semiconductor wafer processing systems.
A variety of material choices are available in stainless steel or aluminum centering ring assemblies. O-ring materials are available in nitrile, (for moderate temperature), fluorocarbon (for moderate chemistries up to 400°F) and Parofluor ULTRATM perfluorinated elastomers (for high purity, aggressive chemistries and temperatures up to 608°F).
Product Highlights:
- Leading technology in O-ring elastomer materials
- Excellent compression set resistance
- Broadest range of materials offering
Within critical semiconductor vacuum environments, KF centering ring seal assemblies must maintain a reliable, effective vacuum seal. In order to assure maximum seal performance, O-rings on these assemblies must provide low compression set and high retained resiliency. Parker’s full range of KF type centering rings are available in standard ISO sizes assembled with Parker O-ring materials commonly used in semiconductor wafer processing systems.
A variety of material choices are available in stainless steel or aluminum centering ring assemblies. O-ring materials are available in nitrile, (for moderate temperature), fluorocarbon (for moderate chemistries up to 400°F) and Parofluor ULTRATM perfluorinated elastomers (for high purity, aggressive chemistries and temperatures up to 608°F).
Parker Advantages
- Leading technology in O-ring elastomer materials
- Excellent compression set resistance
- Broadest range of materials offering
- High performance physical properties
- Parker’s total batch control and traceability of O-rings
- Application engineering assistance
- Local stocking distributor and Parker Service Center (PSC) network
- Clean room packaging available on request
- Total sealing product solutions
This warranty comprises the sole and entire warranty pertaining to items provided hereunder. seller makes no other warranty, guarantee, or representation of any kind whatsoever. All other warranties, including but not limited to, merchant ability and fitness for purpose, whether expressed, implied, or arising by operation of law, trade usage, or course of dealing are hereby disclaimed. Notwithstanding the foregoing, there are no warranties whatsoever on items built or acquired wholly or partially, to buyer’s designs or specifications.
Limitation of remedy: Seller’s Liability arising from or in any way connected with the items sold or this contract shall be limited exclusively to repair or replacement of the items sold or refund of the purchase price paid by buyer, at seller’s sole option. In no event shall seller be liable for any incidental, consequential or special damages of any kind or nature whatsoever, including but not limited to lost profits arising from or in any way connected with this agreement or items sold hereunder, whether alleged to arise from breach of contract, expressed or implied warranty, or in tort, including without limitation, negligence, failure to warn or strict liability.
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Within critical semiconductor vacuum environments, KF centering ring seal assemblies must maintain a reliable, effective vacuum seal. In order to assure maximum seal performance, O-rings on these assemblies must provide low compression set and high retained resiliency. Parker’s full range of KF type centering rings are available in standard ISO sizes assembled with Parker O-ring materials commonly used in semiconductor wafer processing systems.
A variety of material choices are available in stainless steel or aluminum centering ring assemblies. O-ring materials are available in nitrile, (for moderate temperature), fluorocarbon (for moderate chemistries up to 400°F) and Parofluor ULTRATM perfluorinated elastomers (for high purity, aggressive chemistries and temperatures up to 608°F).
Parker Advantages
- Leading technology in O-ring elastomer materials
- Excellent compression set resistance
- Broadest range of materials offering
- High performance physical properties
- Parker’s total batch control and traceability of O-rings
- Application engineering assistance
- Local stocking distributor and Parker Service Center (PSC) network
- Clean room packaging available on request
- Total sealing product solutions
- Specs
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- Resources
- Warranty
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This warranty comprises the sole and entire warranty pertaining to items provided hereunder. seller makes no other warranty, guarantee, or representation of any kind whatsoever. All other warranties, including but not limited to, merchant ability and fitness for purpose, whether expressed, implied, or arising by operation of law, trade usage, or course of dealing are hereby disclaimed. Notwithstanding the foregoing, there are no warranties whatsoever on items built or acquired wholly or partially, to buyer’s designs or specifications.
Limitation of remedy: Seller’s Liability arising from or in any way connected with the items sold or this contract shall be limited exclusively to repair or replacement of the items sold or refund of the purchase price paid by buyer, at seller’s sole option. In no event shall seller be liable for any incidental, consequential or special damages of any kind or nature whatsoever, including but not limited to lost profits arising from or in any way connected with this agreement or items sold hereunder, whether alleged to arise from breach of contract, expressed or implied warranty, or in tort, including without limitation, negligence, failure to warn or strict liability.
